2012 CNSE Faculty Research Report Final

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faculty research report 2012 www.sunycnse.com

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alain e kaloyeros ph.d cnse senior vice president and chief executive officer vice president and special advisor to the president university-wide economic innovation and outreach professor of nanoscience michael liehr ph.d cnse executive vice president of innovation and technology cnse vice president for research suny college of nanoscale science and engineering 257 fuller road albany new york 12203 www.sunycnse.com the cnse 2012 annual faculty report is also available on the web at http www.sunycnse.com/leadingedgeresearchanddevelopment.aspx report compiled and edited by steve janack steve ference kristin haacker angus mackie cover and insert design by kristin haacker photography by melissa renzi © 2013

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table of contents the nanoscience constellation ion beam laboratory 8 hassaram bakhru ph.d distinguished service professor and head nanoscience constellation mengbing huang ph.d associate professor of nanoscience characterization metrology and physics of nanoscale materials and structures 13 alain diebold ph.d empire innovation professor of nanoscale science executive director center for nanoscale metrology defects and microstructural engineering 18 kathleen dunn ph.d associate professor of nanoscience nanomaterials processing 22 eric eisenbraun ph.d associate professor of nanoscience compact photoelectron source for electron beam lithography and inspection 23 timothy groves ph.d empire innovation professor of nanoscale science and associate head nanoscience constellation director center for nanolithography development heon joon choi cnse ph.d student electron scattering and spintronics 32 vincent labella ph.d associate professor of nanoscience reliability science and engineering 34 james lloyd ph.d senior research scientist x-ray scattering 37 richard matyi ph.d professor of nanoscience compound semiconductor research 39 serge oktyabrsky ph.d professor of nanoscience nanoscale characterization and metrology 43 bradley thiel ph.d professor of nanoscience surface science 45 carl ventrice ph.d associate professor of nanoscience 1

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table of contents the nanoengineering constellation plasmonics-based chemical sensors 48 michael carpenter ph.d associate professor of nanoengineering lithography 51 gregory denbeaux ph.d associate professor of nanoengineering photovoltaics and thermoelectrics 55 harry efstathiadis ph.d associate professor of nanoengineering pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny u.s photovoltaic manufacturing consortium 62 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny makoto hirayama ph.d cnse vice president for asian and pacific rim strategic alliances professor of nanoengineering timothy groves ph.d empire innovation professor of nanoscale science and associate head nanoscience constellation director center for nanolithography development alain diebold ph.d empire innovation professor of nanoscale science executive director center for nanoscale metrology james lloyd ph.d senior research scientist harry efstathiadis ph.d associate professor of nanoengineering energy storage devices 67 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny manisha rane-fondacaro ph.d instructor seiichiro higashiya ph.d research scientist incorporation of plasmonic au nanoparticle nps in organic solar cells 69 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny zhouying zhao ph.d research associate 2

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table of contents nanopatterning 71 john hartley ph.d professor and head nanoengineering constellation director advanced lithography center aspire nsf air program 76 john hartley ph.d professor and head nanoengineering constellation director advanced lithography center pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny global exchange programs 78 makoto hirayama ph.d cnse vice president for asian and pacific rim strategic alliances professor of nanoengineering carbon nanotube and graphene electronics 79 ji ung lee ph.d empire innovation professor of nanoscale engineering development of graphene electrode-based liquid crystal devices for innovative futureglass smart window applications 82 ji ung lee ph.d empire innovation professor of nanoscale engineering pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny zhouying zhao ph.d research associate enable nsf air program development of graphene electrode-based organic solar cell 85 ji ung lee ph.d empire innovation professor of nanoscale engineering pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny zhouying zhao ph.d research associate nano-inspired device research 88 bin yu ph.d professor of nanoengineering 3

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table of contents the nanoeconomics constellation nice-ip nsf pfi program 94 harry efstathiadis ph.d associate professor of nanoengineering pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny the photovoltaic energy monitoring control center pv emc2 initiative 96 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny clean program nsf pfi 98 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny iclean cnse s energy and nanotechnology incubator program 101 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny laura schultz ph.d assistant professor of nanoeconomics new york business plan competition 104 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny laura schultz ph.d assistant professor of nanoeconomics tech valley innovation pipeline initiative 107 pradeep haldar ph.d cnse vp for clean energy programs professor and head nanoengineering constellation director e2tac executive director neny laura schultz ph.d assistant professor of nanoeconomics the economics of emerging technologies understanding commercialization and estimating impacts 109 laura schultz ph.d assistant professor of nanoeconomics 4

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table of contents the nanobioscience constellation sensors components and mitigators of stress and damage signaling 114 thomas begley ph.d associate vice president and director of the systems toxicology laboratory assistant professor of nanobioscience bio-derived nanomaterials for nanomedicine and characterization of icvd-polymers for surface modification and low-temperature bonding 119 magnus bergkvist ph.d assistant professor of nanobioscience occupational and environmental health and safety of engineered nanomaterials 123 sara brenner m.d m.p.h assistant professor of nanobioscience and assistant vice president for nanohealth initiatives nanobiotechnology biosensors bioinspired devices 130 nathaniel cady ph.d assistant professor of nanobioscience wafer processing and nanobioscience research 137 james castracane ph.d professor and head nanobioscience constellation nanobiotechnology approaches to study cancer metastasis 143 nadine hempel ph.d assistant professor of nanobioscience nanobioscience 147 j andres melendez ph.d professor of nanobioscience and associate head nanobioscience constellation stem cell engineering and self-assembling machine systems 152 janet paluh ph.d associate professor of nanobioscience mammalian and microbial cell bioprocessing 156 susan sharfstein ph.d associate professor of nanobioscience microplatforms for tissue engineering of stem cells and self-assembling systems for next-generation bionanofabrication 160 scott tenenbaum ph.d associate professor of nanobioscience nanobioengineering stem cell technology 164 yubing xie ph.d assistant professor of nanobioscience 5

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it is a pleasure to present the 2012 faculty research report for the suny college of nanoscale science and engineering cnse this comprehensive document showcases the world-class innovation ecosystem at cnse which is fueling the rapid growth of new york s nanotechnology economy a product of the pioneering vision bold strategy and recognized leadership of governor andrew m cuomo the mission of the college of nanoscale science and engineering to serve as an intellectually vibrant powerhouse for research and education in nanotechnology disciplines from theoretical principles to practical applications is clearly evident through the groundbreaking research conducted by faculty at cnse s unparalleled albany nanotech complex this work is catalyzing a world in which ultra-fast and secure information is more accessible than ever novel approaches to health care offer improved detection treatment and prevention of disease clean energy applications are not just an idea but a reality for improving our environment and so many other novel nanoscale advances promise to enhance our daily lives with its unique industry-university-government partnership model providing access to 300mm and 450mm wafer processing capabilities cnse is not only propelling next-generation research but is also able to quickly and efficiently integrate these boundary pushing discoveries into advanced manufacturing processes providing a true lab to fab capability that accelerates innovation while controlling costs amid an increasingly complex r&d environment the 2012 faculty research report highlights the key areas of educational and research focus for cnse v nanoscience refers to the observation identification description discovery experimental investigation and theoretical interpretation of nanoscale phenomena v nanoengineering is the application of nanoscience principles to practical ends such as the design manufacture and operation of efficient and functional structures machines processes and systems on the atomic scale v nanoeconomics is the formulation study and analysis of the economic and business principles underlying the development and deployment of nanoscale know how products and systems v nanobioscience refers to the application of nanoscale scientific concepts and principles to the study of biological and biomedical structures and systems nanobioscience also encompasses cnse s nanohealth initiative which is aimed at developing novel nanotechnology applications in nanomedicine including nanotoxicology and environmental and public health thank you for the opportunity to share this exciting work michael liehr cnse executive vice president of innovation and technology vice president for research

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nanoscience nanoscience refers to the observation identification description discovery experimental investigation and theoretical interpretation of nanoscale phenomena 2012

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the nanoscience constellation ion beam laboratory bakhru and huang scope ion beam characterization rbs nra pixe high-res rbs microbeam and fabrication ion implantation goals fabrication and characterization of nanoscale and microscale devices and structures for electronic photonic and spintronic applications 2012 accomplishments topic 1 planar fabrication of arrays of ion-exfoliated single-crystal diamond membranes with nitrogen-vacancy color centers we demonstrated a planar ion-exfoliation/dry etching fabrication-process for high-optical-quality single-crystal-diamond membranes the process allows patterning of an array of 200 nm-thick membranes with millimeter-to-micrometer dimensions and exfoliation of the thin films from a single-crystal diamond sample via a parallel fabrication process the optical properties of the films are measured using transmission microscopy raman and fluorescence spectroscopy the process yields a measured nitrogen-vacancy emission spectra having the zero-phonon line zpl peak of negatively charged centers in an unshifted spectral position suggesting high quality crystalline material figure 1 steps in the process used to form arrays of patterned cvd diamond thin films 8

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the nanoscience constellation figure 2 patterned single-crystal diamond the dry-etched trenches expose the lateral edges of a graphitized region and enable etch undercut for exfoliation with a predetermined film shape figure 3 a sem image of six diamond films resting on a pdms stamp µ each film is 120 µm on its side and 5 µm thick b atomic force microscopic scan of the back side of the diamond film o gaathon j.s hodges e.h chen l li s bakhru h bakhru d englund and r.m osgood jr planar fabrication of arrays of ion-exfoliated single-crystal-diamond membranes with nitrogen-vacancy color centers optical materials 2012 article in press avishai ofan ophir gaathon lihua zhang kenneth evans-lutterodt sasha bakhru hassaram bakhru yimei zhu david welch and richard m osgood jr twinning and dislocation pileups in heavily implanted linbo3 phys rev b 83 064104 2011 topic 2 fabrication and analysis of embedded nickel nanoparticles in silicon for spintronic applications cavities were created by hydrogen implantation and annealing inside a silicon substrate which were then decorated by implanted nickel this has been achieved using the extrion 400kv implanter and the dynamitron 2mev implanter figure 4 figure 5 9

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the nanoscience constellation figure 6 moment emu vs magnetic field oe topic 3 activation and residual defects in b-doped ultra-shallow junctions using the in-house developed ion beam analysis techniques we have characterized b-doped ultra-shallow junctions the latest developed ion beam analysis techniques enable us to depth profile active total boron profiles and silicon lattice defects these techniques enabled us to develop an understanding of the physical mechanism involved in the diffusion characteristics of ultra-shallow junctions boron interstitial clusters bic are the biggest reason for the deactivation of highly doped ultra shallow junctions we have identified the optimum process conditions to dissolve the bics and enable highly activated ultra-shallow junctions figure 7 a time required for boron to diffuse 1 nm at various temperatures figure 7 b diffusion behavior of boron changes due to the order of anneal bic s dissolve and agglomerate depending upon different laser and spike annealing temperature 10

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the nanoscience constellation figure 7 c ion beam base substitutional fraction of laser annealing of ultra shallow junctions activated dose dependence on implantation energy figure 7 d defect annealing characteristics of laser anneal high interstitial concentration from 5 kev implant from laser anneal is not annealed by laser annealing lakshmanan vanamurthy mengbing huang hassaram bakhru comparison of residual defects and activation in spike and msec annealed boron doped ultra shallow junctions to be submitted to applied physics letters topic 4 fabrication of embedded ag nanoparticles in silicon for photovoltaic applications v deep-level transient spectroscopy system set up calibrated and tested for high sensitivity impurity spectroscopy · zn implanted si sample ~1e16/cm3 shows trap concentration of ~3.2e14 /cm3 acceptor trap level of ec 0.617 ev and capture cross section of 2.5e-12 cm2 figure 8 a ag nanoparticles successfully fabricated in single crystalline silicon using implantation and deposition figure 8 b electrically active ag impurity concentrations in nanoparticle enhanced silicon solar cells probed by dlts system electrically active concentrations of 1e15/cm3 detected at midgap region research ongoing 11

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