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activities report 2010/11 © 1

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taking on the grand challenges 2 010 has been a year of recovery for european industry with collaborative projects in all industrial sectors leti has contributed to this improving landscape by working closely with its partners to support their innovation and development and taking strong orientations in its applied-research programs this is reflected in our scientific and technical results as well as in the investments we made in equipment and infrastructure in the field of nanoelectronics leti teamed with stmicroelectronics ibm and soitec to demonstrate a simple route to power-efficient cmos through planar fd-soi technology fully depleted silicon on insulator this provides a path for further integration in low-power systems with capabilities ranging from the 28nm to 11nm technology nodes in its pursuit of various approaches to integration of electronic functions leti opened a unique r&d and prototyping platform for 3d integration on 300mm this line contributes to new generations of devices and allows leti and its partners to assess multiple applications expanding the frontiers of microelectronics and strengthening the global 3d-integration ecosystem in the grenoble area with increasing demand for performance and speed on ics integrated optics on silicon offers disruptive capabilities as a result of its significant developments in this field leti has formed a unique joint venture with bell labs and thales combining our expertise on silicon and iii-v semiconductors to address sectors such as telecommunications biology environment security and space energy efficiency and sourcing and their environmental impact are critical issues for the planet leti sharpened its focus on this field where our technology developments brought improved performance in photovoltaic devices on thin-film silicon modules 2 activities report 2010-2011 /

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editorial which are well-suited for europe s climates as well as in concentration photovoltaics where our cooperation with fraunhofer ise and soitec solar produced cost-effective solutions for sunbelt regions our results on battery-monitoring and management systems for electric vehicles pave the way to improved efficiency and autonomy health is another field of universal impact where microtechnologies bring actual solutions 2010 was a year of enhanced cooperation with medical teams and the med-tech industry for setting up new methodologies for diagnosis and treatment major breakthroughs were demonstrated on devices for localized drug delivery as well as for very sensitive and ultra-fast bacterial detection and identification building on an initiative begun some years ago leti strengthened its programs with smes we opened a new showroom offering 100 models and demonstrators through six applicative domains to allow participants from all sectors to create prototype and innovate more openly successful technology transfers went to the market in 2010 with companies such as ryb scanco medical bubbendorff and ulis highlighting many of our key research activities this report addresses the grand challenges our society faces with a significant part devoted to applications health and environment telecommunications photonics and multimedia energy transport and building defense and security as well as arts and culture i wish you an enjoyable review of another productive year for leti and its partners laurent malier director of leti carnot institute minatec campus editorial 3

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contents p.2 p.4 p.6 p.8 editorial contents leti s difference activities p.10 p.16 p.22 p.26 p.32 p.36 p.40 health and environment telecommunications photonics and multimedia energy transport and housing defence and security aerospace arts and culture 4 activities report 2010-2011 /

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contents p.45 p.50 p.57 p.62 nanoelectronics and heterogeneous integration on silicon platforms partnerships general organization contents 5

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leti s difference promoting research and innovation creating value and improving the quality of life f through cooperation with industry leti offers its partners a strong level of response and commitment comparable to an internal team the flexibility of an outsourced activity or more than four decades leti has focused on innovation commercializing upstream research and technological breakthroughs to help our partners create jobs and build value · · · competitive advantage ip and proprietary results our goal is to improve quality of life through new technologies by applying research from the best academic laboratories for a wide range of applications including telecommunications health consumer electronics defence and safety transportation building sports leisure and the environment as a bridge between upstream laboratories and the marketplace for advanced technology we conduct more than 85 percent of our research activities with outside partners leti filed 265 new patents in 2010 bringing our total patent portfolio to more than 1,700 families and protecting our industrial partners on the technologies we develop with them clear rules for patent ownership and exploitation are defined before the start of the projects so that our industrial partners benefit from a well-defined competitive advantage backed by our patents we develop process steps and industrial process flows for micro and nanotechnologies we prototype advanced components and we accelerate their integration into systems in addition to disseminating these innovations to the private sector we also propose access to state-of-the-art process design and characterization tools for our industrial partners as a partner of industry around the world we host 200 industrial assignees on our site and we execute 350 contracts a year leti has led to the creation of 37 startups in high technology including soitec the world leader in silicon-oninsulator soi over the past 20 years leti startups generated economic value and created more than 2,000 direct jobs 6 activities report 2010-2011 /

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leti s difference ways of working with leti leti offers four types of joint development projects ranging from several months to several years · r&d projects in a consortium enable industrial partners to pool their research costs and benefit from significant subsidies often for long-term issues · bilateral agreements last up to two years and are guided by precise objectives with a performance schedule and milestones to be met including technology transfer and ip valorization the development team primarily includes leti researchers and may involve our partners staffs · joint lab is a unique contract frame ideal for managing a set of projects with maximum response to our partners industrial strategy set for a minimum of three years it includes technology transfer and peer ip management it involves teams from leti and our partners which often work on both leti and industrial sites · technology transfer leti teams provide our partners with all the required process documentation we also train their employees at our facilities prior to bringing support and assistance to their manufacturing site for process-flow introduction i with a specialized interest in smart devices leti primarily focuses on microand nanotechnologies for microelectronics technologies design and integration of microsystems imaging technologies micro and nanotechnologies for biology and health and communication technologies and nomad objects ···· 265 patents filed in 2010 1 701 patents in portfolio patents in portfolio patents filed in 2010 patents progress over time · microelectronics · optronics photonics · microtechnology · telecommunications design · biology healthcare 431 306 273 389 302 62 55 43 66 39 leti s difference 7

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8 activities report 2010-2011 /

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activities p.10 health and environment p.16 telecommunications p.22 photonics and multimedia p.26 energy transport and housing p.32 defence and security p.36 aerospace p.40 arts and culture activities 9

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health and environment collaborating innovating and miniaturizing for improved healthcare olivier peyret olivier.peyret@cea.fr he healthcare needs of a growing and aging population around the world present opportunities as well as challenges for leti and our partners by 2045 there will be 2 billion people over 60 up from 600 million today this will fuel an increase in age-specific chronic and degenerative illnesses such as cardiac disease cancer diabetes alzheimer s and parkinson s meanwhile developing countries will require improved basic healthcare especially in rural areas where people have little access to hospitals and clinics leti s response is to create and develop new technologies and innovative solutions that will further improve medical diagnosis and treatment for people throughout the world and create market opportunities for our industrial partners micro and nanotechnologies provide new solutions for drug delivery and medical diagnostics our startup fluoptics is pushing ahead with fluorescence imaging that precisely locates and measures tumors inside the body and we re complementing research in diagnostic and treatment techniques with development of less-invasive surgical tools medical diagnostics requires early-stage detection better productivity and cost efficiency inside large centralized structures while personalized medicine thrives in a decentralized organization that provides results close to doctor and patient however sample preparation integration remains the key for both centralized labs and point-of-care diagnostics leti s multidisciplinary work involving engineers physicists biologists and chemists is helping meet the needs of both these delivery venues i t 10 activities report 2010-2011 /

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health and environment 2010 highlight o ur multidisciplinary r&d teams have the unique ability to provide innovative solutions that help bridge the gap between emerging technologies and everyday life as a consequence we increased our volume of contracts with companies looking for disruptive technology solutions in 2010 © cea-ph stroppa activities 11

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2010 highlight nanomedicine nanomedicine holds tremendous potential to improve healthcare through highly targeted drug delivery that carries the medicine to the source of the disease a cancerous tumor for example patients experience an overall improvement in their quality of life along with the highest therapeutic benefit and reduced side effects accurately targeted drug delivery also enables a reduction of injected dose our nanomedicine division is developing a biodegradable non-toxic drug-delivery system using lipid nanoparticles that is more robust simpler safer and easier to scale up than even state-of-the-art nanocarriers i © cea-leti g cottet e are working with pharmaceutical and biotech companies whose drugs or imaging agents achieve limited distribution in the body because they are relatively insoluble in the blood using leti s patented lipidots® particles which can be administered intravenously orally or topically our teams have proposed a new solution for efficiently transporting these ingredients in the body w fluorescent nanoemulsion 2010 highlight lab-on-chip lab-on-chip technology offers another powerful illustration of the benefits that microtechnologies bring to the healthcare industry and ultimately to individuals and families worldwide its applications span key sectors of the industry from hospitals and home healthcare providers to diagnostic equipment makers and pharmaceutical companies working with sanofi-pasteur biomérieux merial transgene généthon and stmicroelectronics leti s lab-on-chip program is adapting micro and nanotechnologies to develop new biological-analysis tools for clinicians biologists and physicians fitting the key functions of a clinical lab onto a portable device requires a variety of microtechnologies and microfluidics to miniaturize and integrate all the steps of a biological or chemical-analysis process in the industrialized world labs-on-chips offer multiple advantages including better process control for biotechnology and pharmaceutical companies the environmental benefits are obvious as well pathogens in the air or water various pollutants as volatile organic compounds in indoor atmosphere or heavy metals in water can be identified immediately at the source but perhaps the greatest potential significance of the lab-on-chip is the ability to provide new tools and technology for simpler faster cheaper monitoring control anywhere on earth i i in 2010 we optimized a sample-preparation protocol based on micro-structured reactor and improved process control for biotechnology fabrication with sanofi-pasteur transgene and généthon © cea/leti 12 activities report 2010-2011 optical bench measurement for process control for biotechniology fabrication patvax project

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health and environment 2010 highlight electronic medical devices the realm of miniaturized medical devices also is a promising area for making healthcare more efficient and easier for patients leti s delice project for example is demonstrating highly controllable local drug delivery with reduced side effects guided by a dedicated electronic architecture this disruptive technology uses an implantable miniaturized silicon micro-pump in a total drug-delivery control system the primary application is a fully implantable device for local cancer treatment eliminating the need for less efficient systemic drug delivery this system will open new business opportunities in drug delivery systems for our partner for patients local drug delivery offers a less stringent therapy with reduced side effects because the anti-cancer drug is dispensed directly at the tumor for society as a whole this new device will contribute to more-efficient chronic disease management this high-precision high-resolution micro-pump also can be used in industrial applications needing precise liquid dosing in a compact footprint i e have demonstrated a silicon micro-pump with a total drug-delivery control system especially for intratumoral delivery of drugs without backflow the characteristics of the micro-device perfectly match the requirements of our industrial partner w wearable devices building on the role sensors already play in monitoring patients health and well-being we are expanding the range of applications for biosensors and physical sensors by combining leti s competencies in chemistry electrochemistry biology microfluidics packaging electronics signal processing and data fusion working with partners movea and members of the european nanodialysis program we are investigating non-invasive biosensor applications such as monitoring dehydration via body fluid such as sweat in emergency workers soldiers and others working in stressful situations other potential applications include monitoring blood plasma in artificial kidney devices use of smart phones weight control and measuring the body s energy use i © cea-leti/g cottet silicon micro-pump with a total drug delivery system © cea-leti g cottet application in monitoring dehydration for firemen activities 13

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